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Ulvac PMB100D - Automatic Operation

Ulvac PMB100D
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YK11-0016-DI-002-08
23
2.7 Automatic Operation
This pump has a certain operating pressure range. When starting it, therefore, it is necessary to
monitor the vacuum gauge.
In automatic operation, it is necessary to install a vacuum switch for pressure detection. When the
pressure on the intake side becomes lower than the maximum intake pressure, the vacuum switch
is actuated to start the mechanical booster pump. In the method in Fig. 19, a pneumatically
controlled roughing valve is used which can be interlocked with a vacuum switch.
The vacuum switch is available in two types: mechanical and electrical. It is installed on the vacuum
chamber or near the intake port of the mechanical booster pump.
When the auxiliary pump is stopped, please as this pump is stopped.
CAUTION
When using the vacuum pump other than the standard backing
pump as the backing
pump, since the maximum intake pressure
becomes different from the described value, be careful for it.
CAUTION
When the difference is not available in between the pressure in the
vacuum chamber and the pressure of inlet port of the mechanical
booster pump, it is okayed to mount the vacuum switch on the
vacuum chamber.

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