Ulvac PMB100D - Checking the Noise and Abnormal Vibration; Check the Rotor and Casing

YK11-0016-DI-002-08
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6.2.7 Checking The Noise and Abnormal Vibration
Checking around the pump
(1) Check whether bolts and nuts and the like fixing the pump are loose or not.
(2) Check whether pipes connected to the inlet/outlet are loose or not.
(3) Check and ensure that there is no leakage from the piping and valves.
Checking the pump
Please refer to the “6.5 Trouble check list.”
Should the condition was not recovered after having checked points indicated there, please contact
the closest Service center.
6.2.8 Check the Rotor and Casing
Stop the mechanical booster pump once per 3 months, remove the inlet port piping to perform the
internal inspection.
Confirm that there is no attachment inside the casing (Rotor surface, casing surface).
In particular, when the organic gas is exhausting, since the substance in gas condenses and
adheres on the rotor surface, the gap becomes narrow, and it may become rotation impossible.