Vacuum System 6
Troubleshooting and Maintenance Manual 131
Vacuum System Components
The parts of the vacuum system are:
• Foreline (rough) pump
• High-vacuum turbo pump
• Front and rear analyzer chambers
• Collision cell cover
• Side plates (analyzer doors), and front and rear end plates
• Vacuum seals
• Calibration valve and vent valve
• Vacuum control electronics
• Vacuum gauges and gauge control electronics
Each of these is discussed in more detail in this chapter.
Figure 19 Major vacuum system components
To foreline pump
Tur bo p ump
Turbo pump
Analyzer chamber
GC/MS interface
Ion vacuum gauges
cooling fan
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