Vacuum System 6
Troubleshooting and Maintenance Manual 139
Foreline Gauge
The foreline gauge monitors the pressure (vacuum) at the exit of the turbo
pump. The primary function of the foreline gauge is pump control. When the
foreline pump has reduced the pressure in the analyzer chamber to below
300 mTorr (0.3 Torr), the turbo pump is automatically switched on. If the
foreline pressure rises above 400 mTorr (0.4 Torr), the AC board switches off
the analyzer electronics.
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