Replacement Parts 9
Troubleshooting and Maintenance Manual 195
Analyzer
Table 16 shows the analyzer chambers and associated parts.
Table 1 6 Front analyzer chamber and related parts (Figure 46)
Item Description Part number
1 Shield/plate for ion gauge port G3170-00003
Ion vacuum gauge baffle G3170-00015
• M3X12 TX T10 PN SQ Cone SS (qty 2) 0515-0664
2 EI Calibration valve assembly G3170-60204
3 Calibration vial G3170-80002
4 End plate front glass G3170-20552
4 End plate front acrylic G3170-20022
5 End plate front frame G3170-00001
End plate rear cap G3170-20553
Side plate (includes feedthrough and thumbscrews) G3170-60021
6 Vent valve knob G3170-20554
Figure 46 Analyzer chambers and related parts
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