194 Troubleshooting and Maintenance Manual
9 Replacement Parts
Turbo pump and related parts
Table 1 5 Tu rbo pump MS vac uum system components
Item Description Part number
1 Fan (for high-vacuum pump) G1099-60564
KF25 clamp (for turbo pump outlet) 0100-0549
KF25 O-ring assembly (for turbo pump outlet) 0100-1551
Split flow turbo pump G7000-80010
Split flow turbo pump, rebuilt G7000-89010
ISO100 seals 0100-1879
Flat washers, 4 (to mount pump) 3050-0881
Lock washers, 4 (to mount pump) 2190-0669
Hex nuts, 4 (to mount pump) 0535-0048
Turbo controller, EXDC80, 24V G67000-80080
O-ring, foreline hose assembly 0905-1680
Hinged clamp with wing nut, NW20/25 0100-1398
Cable, turbo pump and controller G7000-60811
Power supply, TMH G7000-60600
Auxiliary EPC flow module G1570-60535
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