190 Troubleshooting and Maintenance Manual
9 Replacement Parts
Vacuum System
This section lists replacement parts available for the vacuum system. It
includes clamps, O-rings and seals (Table 13), foreline pump and related
components (Table 14 and Figure 45), and turbo pump vacuum system
components (Table 15).
O-rings and seals
Table 1 3 O-rings and seals
Description Part number
Calibration valve O-ring (1/4-inch) 5180-4182
End plate O-ring (for front and rear end plates) 0905-1441
GC/MS interface O-ring 0905-1405
HED feedthrough G1099-80012
HED feedthrough O-ring 0905-0490
KF10/16 seal (foreline pump inlet and turbo pump outlet) 0905-1463
KF25 O-ring assembly (turbo pump outlet) 0100-1551
Seal, performance turbo pump inlet 0100-1879
O-ring, forepump drain plug 0905-1619
Fill plug, forepump 0100-2451
Analyzer ion gauge G1960-80303
Foreline ion gauge G1960-80101
O-ring, forepump fill plug 0905-1630
O-ring, ion gauge 0905-1627
O-ring, collision cell feedthrough 0905-1405
O-ring, collision cell plate 0905-1689
Side plate O-ring 0905-1690
Vent valve O-ring (1/4-inch) 5180-4182
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