Electronics 8
Troubleshooting and Maintenance Manual 167
Ion Source Board
The ion source board performs these functions:
• Passes voltages generated on the main board and the filament drive board
to elements in the ion source.
• Generates and adjusts filament emission current and electron energy as
controlled by the main board.
• Switches the filament power from one filament to the other.
Figure 36 Ion source board