200 Troubleshooting and Maintenance Manual
9 Replacement Parts
EI Extractor source
Table 2 0 EI extractor ion source
Description Part number
Inert ion source, new G7000-65710
Inert ion source, rebuilt G7000-69710
11 Extractor lens, 3 mm G7000-20444
Extractor lens, 6 mm G7000-20446
12 Extractor lens insulator G7000-20445
Extractor lens wire G7000-60827
9 Entrance lens G3170-20126
3 EI filament G2590-80070
EI high temp filament G2590-60053
4 Interface socket G7000-20136
10 Ion focus lens G1999-20443
8 Lens insulator (one piece) G3170-20530
Inert EI 350 Anodized Repeller assembly G3170-60171
7 Screws for filament G1999-20021
6 Source heater assembly G3170-60177
2 Setscrew for lens stack G1999-20021
1 Source body G7000-20430
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