202 Troubleshooting and Maintenance Manual
9 Replacement Parts
CI source
Table 2 1 CI ion source
Description Part number
Inert ion source, new G3170-65403
11 CI Drawout cyclinder G1999-20444
12 CI Drawout plate G1999-20446
9 Entrance lens assembly G3170-20126
3 CI filament G1099-80053
13 CI Dummy filament G1999-60454
4 CI interface tip seal G1999-60412
10 CI Ion focus lens G1999-20443
8 CI lens insulator (one piece) G3170-20540
5 CI repeller G1999-20432
14 CI repeller insulator G1999-20433
7 Gold fil screw G1999-20021
6 Source heater assembly G3170-60415
2 Screw-set, M3x3L, gold plated G1999-20022
1 CI Source body G1999-20430
CI ion source box G1999-65001
Washer-spr CRVD 1.6 1.8-MM-ID, 4-MM-OD, SS 3050-1375
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