ASP sterrad NX - Page 65

7
Reports and
(Plasma Pumpdown 1)
Start Time End Time Time
XX:XX:XX XX:XX:XX XX:XX:XX
Sensor
Max
Pressure:
>30Torr
Chamber
xx.xC
Door Temp: xx.xC
xx.xC
Condenser
Temp: xx.xC
Max. Delivered Power:
Min. Delivered Power:
Vaporizer Temp: xx.xC xx.xC
Condenser Temp: xx.xC xx.xC
H202 Monitoring(mgll): x.x X.x
Pumpdown 2)
Start Time
End Time Time
XX:XX:XX
XX:XX:XX XX:XX:XX
Sensor
Max Min
Pressure:
xxxTorr
xxxTorr
Chamber
xx.xC
xx.xC
Door Temp:
xx.xC
xx.xC
xx.xC
xx.xC
xx.xC
xx.xC
(Chamber Pumpdown
2)
Start Time End Time Stage Time
XX:XX:XX XX:XX:XX XX:XX:XX
Sensor Max Min
Pressure: xxxTorr
xxxmTorr
Chamber xx.xC
xx.xC
Door xx.xC
xx.xC
Vaporizer Temp: xx .xC
xx.xC
Condenser Temp: xx.xC
xx.xC
2)
Start Time
End Time Time
XX:XX:XX
XX:XX:XX XX:XX:XX
Sensor
Max Min
Pressure: xxxmTorr xxxmTorr
Chamber xx.xC xx.xC
Door Temp: xx.xC xx.xC
Vaporizer xx.xC xx.xC
Condenser Temp:xx.xC xx.xC
(Pressure Check 2)
Start Time End Time Time
XX:XX:XX XX:XX:XX XX:XX:XX
Sensor Max Min
Pressure:
xxxTorr
xxxTorr
Chamber
xx.xC
xx.xC
Door Temp:
xx.xC
xx.xC
xx.xC
xx.xC
Condenser Temp:xx.xC
xx.xC
Format Report (continued).
71
Plasma Time:
(Plasma
1)
Start Time
XX:XX:XX
Sensor
Pressure:
Chamber
Door Temp:
Vaporizer
Condenser Temp:
(Delivery)
Start Time
XX:XX:XX
Sensor
Pressure:
Chamber
Door
End Time
Max. Delivered Power:
Min. Delivered Power:
Plasma Time:
(Vent
1)
Min
>30Torr
xx.xC
xx.xC
xx.xC
xx.xC
xxx Watts
x Watts
x:xx
Stage Time
XX:XX:XX XX:XX:XX
Max Min
xxxTorr
xxxTorr
xx.xC
xx.xC
xx.xC
xx.xC
Sensor
Max
Pressure: xxxmTorr
Chamber Temp: xx.xC
Door xx.xC
Temp: xx.xC
Condenser Temp:xx.xC
End Time
xx.xC
xx.xC
xx.xC
xx.xC
xxx Watts
x Watts
x:xx
Start Time
End Time Stage Time
XX:XX:XX
XX:XX:XX XX:XX:XX
Min
xxxmTorr
xx.xC
xx.xC
xx.xC
xx.xC
Stage Time
XX:XX:XX XX:XX:XX
Max Min
xxxTorr
xxxTorr
xx.xC
xx.xC
xx.xC
xx.xC
Figure 37.
NX'" User's Guide