ASP sterrad NX - Page 66

7 Reports
Files
(Diffusion 2)
Start Time
End Time Stage Time
Process
r~.~.,I~!fo
XX:XX:XX
XX:XX:XX XX:XX:XX
Sensor Max
Min
xxxTorr
xxxTorr
Validated by:
________ _
xx.xC
xx.xC
xx.xC
xx.xC
xx.xC
xx.xC
Cassette Bar Code: XXXXXXXXXX
xx.xC
xx.xC
Number of Available=X
Pumpdown 2)
Start Time End Time
Time
XX:XX:XX XX:XX:XX
XX:XX:XX
Sensor Max
Min
Pressure: xxxTorr
xxxTorr
Chamber
xx.xC
xx.xC
xx.xC
xx.xC
xx.xC
xx.xC
xX.xC
2)
Start Time
End Time Stage Time
XX:XX:XX
XX:XX:XX XX:XX:XX
Sensor Max Min
Pressure: xxxmTorr xxxmTorr
Chamber Temp: xx.xC xx.xC
Door xx.xC xx.xC
Vaporizer Temp: xx.xC xx.xC
Condenser
Temp:xx.xC xx.xC
Max. Delivered Power: xxx Watts
Min. Delivered Power: x Watts
Plasma Time: x:xx
(Final Vent)
Start Time
End Time
Time
XX:XX:XX XX:XX:XX
XX:XX:XX
Sensor
Max Min
Pressure: xxxTorr
xxxmTorr
Chamber Temp: xx.xC xx.xC
Door Temp: xx.xC
xx.xC
Vaporizer xx.xC
xx.xC
Condenser xx.xC
xx.xC
Max. Delivered Power:
xxx Watts
Min. Delivered Power:
x Watts
Plasma Time:
x:xx
Figure 38. Long Format Report (continued).
STERRAD<B> NX'" User's Guide
72