EBARA EV-S50 - Page 32

P.13
Table 3.4 Specifications
(Model EV-S200 / EV-S200P / EV-S200N)
Model
Model
EV-S200
Model
EV-S200P
Model
EV-S200N
Pumping Speed
20000 L/min
Ultimate Pressure
0.5 Pa
Connection
Gas Inlet
NW100
Gas Outlet
NW40
Approx. Power at Ultimate Pressure
(Max. Power)
0.75 kW
(5.1 kW)
Utili-
ty
Cooling
Water
Connection
Rc 1/4" (Coupler)
Pressure
[Gauge Press.]
Differential Press.: Min. 0.2 MPa
Supply: Max. 0.4 MPa
Flow Rate
2.0 - 3.0 L/min
Temperature
Max. 30°C
N2
Gas
Connection
----------
1/4” Tube Fitting (Same as SWAGELOK)
Pressure
[Gauge Press.]
----------
Supply: 0.15 - 0.7 MPa
[Setting: 0.09 - 0.012 MPa]
Approx. Flow Rate
[N2-0 Mode]
----------
17 - 20 Pa m
3
/s
[2.4 Pa m
3
/s]
Duct
Venti-
Lation
Connection
----------
Φ50 mm
Pressure
----------
-196 Pa
Approx. Flow Rate
----------
0.5 m
3
/min
Lubrication
Oil
Brand
BARRIERTA J100ES (NOK)
Quantity
0.15 L
Approx. Weight
170 kg
Power
Supply
Phase/Volt/Freq.
3 Phase, 200-220V , 50 / 60Hz
Power Capacity
6.8 kVA
Connection
Japan Aviation Electronics Industry
JL04HV-2E22-22PE-B-R
Control Signal
D-sub 15 Pin + D-sub 25 Pin
Communication
RS-232C D-sub 9 Pin X 2
CP Rating
30 A
SCCR
1.0 kA
Airborne noise test data
63 dB
Max inlet pressure / Flow Rate (N
2
)
(for reference)
0.08kPa / 15L/min
0.08kPa / 15L/min
[Note] The ambient temperature of the pump installation place shall be 30 degrees of
centigrade of lower.
PM10U
EBARA
CORPORATION