EBARA EV-S50 - Page 51

P.32
Check Valve
Power
Gas Inlet
Control Circuit
Gas Outlet
Pump N
2
Gas Flow Sensor
N
2
Selector Valve
Pressure Gauge
P
Regulator
N
2
Gas
Motor Driver 1
Motor 1
Main Pump
（ＭＰ）
Motor Driver 2
Control
Connector
Circuit
Protector
LCD Controller
Cooling Water Flow Seneor
Water
FT2
FT1
Booster Pump
（ＢＰ）
Motor 2
Silencer
* The MODEL EV-S20 pump is supplied without a booster pump (BP).
Figure 3.5 System Flow
P&N
PM10U
EBARA
CORPORATION