P.74
(7) When the WARNING/ALARM display appears on the LCD controller or when
any abnormal symptoms are found other than the display, take action in
accordance with 10. "Troubleshooting."
Even when the cause of the WARNING/ALARM display has been removed, it
is maintained until the RESET signal is entered. Either press the RESET
button or enter an external RESET signal from the control signal connector.
In the BUZZER Enabled mode using DIP switches, it is possible to stop the
buzzer by pressing the BZ.OFF button when the alarm is being generated.
(8) When the pump exhaust pipe is equipped with a valve, open this valve before
starting the pump.
CAUTION Problems will occur when the pump is operated with the valve
closed as the exhaust pipe will be pressurized.
PM10U
EBARA
CORPORATION
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