QD002-07 3. Machine Set Up
NXT Setup Manual 97
CN-1
CN-2
CN-M1
Right side
module cover
RH0528*
RH1170*
RH0715*
C
G
N
O
P
Q
R
A
L
M
RH1280*
RH0971*
RH0258*
BRCN3
BRCN2
BRCN1
I/F1 CN27
CN28A
RH0583*
RH1187*
RH1187*
RH1188*
Connected when shipped
(to next stage)
(Fixed)
Disconnect I/O_F of RH0258*,
then connect I/O_F of RH0971*.
Int
rl
k
r
I/O
Safety circuit
Disconnect RH0067*, then
connect RH1189*.
Connected when
shipped
RH0070*
RH1189*
CN-M1
CN-M2
CN-M2
BRCN3
BRCN3
BRCN3
BRCN2
RH1186*
RH1186*
RH1190*
Lane 2-F
Lane 2-R
Lane 1-R
Lane 1-F
Circuit breaker bracket 2
Previous stage side Next stage side
NXTSET207Ea
2M Base - 2M Base - 4M Base - Vacuum Pump Harness Connection Diagram (3/4)
4M base
Panel loading
signal bracket
(Previous stage)
Panel loading
signal bracket
(Next stage)
Disconnect CN27 of RH0715*,
then connect CN27 of RH1170*.
Panel flow