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2. Specification
(3) Driving method
Type Motor type Lead [mm] Encoder pulses
*1
Driving method
2.5
5
SA5C, SA5R 42P
10
Ball screw
10 mm
Rolled, C10
SA5C 42P 20
Ball screw
10 mm
Rolled, C10
3
6
SA6C, SA6R 42P
12
Ball screw
10 mm
Rolled, C10
SA6C 42P 20
Ball screw
10 mm
Rolled, C10
4
8
SA7C, SA7R 56P
16
Ball screw
10 mm
Rolled, C10
3
6
SA7C, SS7R 42P
12
Ball screw
10 mm
Rolled, C10
5
10
SS8C, SS8R 56P
20
Ball screw
16 mm
Rolled, C10
HS8C, HS8R 86P 30
800
Ball screw
16 mm
Rolled, C10
*1. Number of pulses input to the controller.
(4) Cleanliness class of Cleanroom type RCP2CR
Item Specification
Cleanliness class
Class 10 (1
P
m) when air is suctioned from the suction joint at an appropriate rate of
suction
(5) Common specifications
Specification
Item
SA5C or SA6C, lead other than 20 mm SA5C or SA6C, lead 20 mm
Positioning repeatability
*1
r
0.02 mm
r
0.03 mm
Backlash 0.1 mm or less 0.1 mm or less
*1. Default value
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