10. Load on the Actuator ............................................................................................................ 21
11. Notes on Actuators with a Switch (Optional) ........................................................................23
12. Slit for Position Adjustment................................................................................................... 24
13. Cleanroom Specification....................................................................................................... 25
13.1 Suction Rate..................................................................................................................... 25
13.2 Suction Joint..................................................................................................................... 25
14. High Acceleration/Deceleration Compatibility.......................................................................26
14.1 Compatible Actuator Model............................................................................................... 26
14.2 Specifications of the Actuator Compatible with High Acceleration/Deceleration ............... 26
14.3 Points to be Noted............................................................................................................ 27
14.4 Compatible Controller Models (SCON, SSEL and X-SEL)................................................ 27
15. Maintenance and Inspection ................................................................................................ 28
15.1 Inspection Items and Timing............................................................................................. 28
15.2 Visual Inspection of the Machine Exterior......................................................................... 28
15.3 Cleaning ........................................................................................................................... 28
15.4 Interior Inspection............................................................................................................. 29
15.5 Internal Cleaning............................................................................................................... 30
15.6 Lubricating the Guides and Ball Screw............................................................................. 30
15.6.1 Other than Cleanroom Specification.......................................................................... 30
15.6.2 Cleanroom Specification............................................................................................ 31
15.6.3 How to Apply Grease................................................................................................. 32
15.7 Replacing/Adjusting the Stainless Sheet .......................................................................... 33
15.8 Reduction Belt [Motor Reversing Type] ............................................................................ 38
15.8.1 Inspecting the Belt..................................................................................................... 38
15.8.2 Applicable Belt........................................................................................................... 38
15.8.3 Adjusting the Belt Tension (SA4R, SA5R, SA6R)...................................................... 38
15.8.4 Adjusting the Belt Tension (SA7R)............................................................................. 39
15.8.5 Adjusting the Belt Tension (SS7R, SS8R) ................................................................. 39
15.8.6 Replacing the Belt of the Motor Reversing Type (SA4R, SA5R, SA6R) .................... 40
15.8.7 Replacing the Belt of the Motor Reversing Type (SA7R)........................................... 46
15.8.8 Replacing the Belt of the Motor Reversing Type (SS7R, SS8R) ............................... 49
15.9 Replacing the Motor.......................................................................................................... 52
15.9.1 Replacing the Motor of the Motor Straight Type (Coupling Type): SA4C, SA5C, SA6C
.................................................................................................................................. 52
15.9.2 Replacing the Motor of the Motor Straight Type (Coupling Type) .............................. 62
15.9.3 Replacing the Motor of the Motor Straight Type (Coupling Type): SS7C, SS8C........ 68
15.9.4 Replacing the Motor of the Motor Reversing Type: SA4R, SA5R, SA6R................... 80
15.9.5 Replacing the Motor of the Motor Reversing Type: SA7R ......................................... 90
15.9.6 Replacing the Motor of the Motor Reversing Type: SS7R, SS8R.............................. 94
16. Cable Diagram ..................................................................................................................... 99
Appendix ................................................................................................................................... 102
How to use the home mark ....................................................................................................... 102