Inficon Ecotec E3000 530-001 - Page 105

Ecotec E3000 Messages 6-7
kina22e chapter 6.fm technical handbook(1206)
* only to be performed by INFICON-authorized service personnel
E84 Test leak signal too small Issued during calibration
Test leak faulty
Sensor sensitivity too low
Isufficient gas flow to sensor, flow divider
clogged
Recalibrate with different test leak
Call nearest INFICON service
representative!
Replace flow divider*
W85 Problem with peakfind Only during calibration:
Problem with peak finding of Transpector
Perform proof function (see Section
3.5.1)!
If proof is okay, acknowledge, but
schedule service visit!
If proof function is not okay, call
nearest INFICON service
representative!
W86 Internal Calibration not possible Not in measure mode when calibration is
attempted
Wait until Ecotec E3000 enters
measurement mode
W87 Not supported gas in ECO-Check! Occurs only during internal calibration or
proof function
EEPROM in ECO-Check not
programmed
Replace complete ECO-Check
E90 E001: TMP excess rotation speed Rotation speed of TMP too high Call nearest INFICON service
representative!
E91 E002: Power pack unit error Power pack output voltage faulty Call nearest INFICON service
representative!
E92 E006: Start-up time error Free running of the turbo pump restricted
Fore-vacuum pressure too high
Call nearest INFICON service
representative!
E93 E008: Connection TC and pump Connection between TC and pump faulty Call nearest INFICON service
representative!
E94 E015: Error in TC controller Reset the controller with mains ON/
OFF with the pump at standstill
(f=0Hz)*
Call nearest INFICON service
representative!
E95 E021: Incorrect pump identification
resistance
Incorrect pump identification resistance Call nearest INFICON service
representative!
E96 E025: Error in temperature monitoring
TC
Reset the controller with mains ON/
OFF with the pump at standstill
(f=0Hz)
Call nearest INFICON service
representative!
E97 E026: Error of the temperature sensor
inside the TC
Reset the controller with mains ON/
OFF with the pump at standstill
(f=0Hz)
Call nearest INFICON service
representative!
E98 E037: Error in the motor stages or
control
Error in the motor stages or control Call nearest INFICON service
representative!
E99 F007: Mains power failure
Operations voltage has failed
Mains power failure operations voltage
has failed
Call nearest INFICON service
representative!
Error no. Plain text message Possible reason Recommendation