Inficon Ecotec E3000 530-001 - Page 135

Annex 9-2
kina22e chapter 9.fm technical handbook(1206)
R14 CF
4
69.0 88.0 7.0E7
50.0 88.0 7.0E8
R21 CHCI
2
F 67.0 102.9 7.0E7
69.0 102.9 3.5E8
R22 CHCIF
2
51.0 86.5 7.6E7
67.0 86.5 7.6E7
R23 CHF
3
69.0 70.0 2.4E8
51.0 70.0 2.4E8
50.0 70.0 2.4E8
R32 CH
2
F
2
51.0 52.0 7.0E7
52.0 52.0 7.0E8
R41 CH
3
F 34.0 34.0 7.0E7
33.0 34.0 7.0E7
R50 CH
4
Methane
15.0 16.0 7.0E7
R113 CCIF
2
CCI
2
F 101.0 187.4 7.0E7
151.0 187.4 7.0E7
R114 CCIF
2
CCIF
2
85.0 170.9 7.0E7
135.0 170.9 7.0E7
R115 CCIF
2
CF
3
85.0 154.5 7.0E7
119.0 154.5 7.0E7
R116 C
2
F
6
69.0 138.0 7.0E7
119.0 138.0 7.0E7
R123 CHCIFCF
3
83.0 152.9 7.0E7
85.0 152.9 7.0E7
R124 CHCIFCF
3
67.0 136.5 7.0E7
51.0 136.5 7.0E7
Gas designation
(max. 5 digits)
Other Designations Meas. mass
(xxx.x amu)
Molecule mass
(xx.x amu)
Normalisation factor
(Base value x.xEx)