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Inficon UL1000 Fab - Page 117

Inficon UL1000 Fab
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117 Index
iina70e appendix.fm technical handbook(1408)
Power
consumption 15
pressure 40
Protection
Type of
15
Pumping speed 15
Purge 27, 32
Purging 49
Purpose 13
Q
QT100 47
R
Recorder 27, 30
Relay Output 61
RS232 27, 31
run-up mode 48
Run-up time 15
S
Safety Symbols 7
scroll pump 45
Service Center 11
service contract 10
Setpoint 64
sniff mode 47
sniffer line 38, 47
Sniffer mode 15
START Button 35
Startup 34
STOP Button 36
Storage temperature 16
T
Temperature
•ambient 16
•storage 16
time axis 51
Time&Date 79
Transportation 21
trend mode 51
Trigger 50
Trigger alarm 64
turbo pump 45
turbomolecular pump 39
Type of protection 15
U
ULTRA 45
ULTRA only 68
V
Vacuum Diagramm 39
Vacuum mode 15
Valves 16
Vent 27, 32
volume 62
W
Weight 16
Z
Zero 73
ZERO Button 36

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