MKS 649B - Page 6

Table of Contents
vi
장치에 표시된 기호들...................................................................................................1
안전 절차 및 예방조치..................................................................................................2
부품을 교체하거나 기계를 개조하지 마십시오......................................................................2
자격이 있는 사람에게만 서비스를 받으십시오......................................................................2
전류가 통하는 회로에서 분리해 보관하십시오......................................................................2
위험한 물질과 함께 작동할 때는 주의를 기울이십시오........................................................2
기계를 청소하십시오.................................................................................................................2
청소 시에는 적절한 절차를 사용하십시오..............................................................................2
폭발성 환경에서 작동하지 마십시오.......................................................................................2
적절한 조립부품과 조임 절차를 사용하십시오......................................................................2
누출방지 조립부품을 점검하십시오........................................................................................2
안전한 흡입 압력에서 작동하십시오.......................................................................................
2
적합한 안전 파열판을 설치하십시오.......................................................................................2
장치를 오염이 없는 곳에 보관하십시오..................................................................................3
온도 제어 장치의 경우 알맞은 시동 시간을 두십시오...........................................................3
Chapter One: General Information .............................................................................................5
Introduction.....................................................................................................................5
Design Features of the Integral Mass Flow Meter.............................................5
Cleanliness Features...........................................................................................6
How This Manual is Organized......................................................................................6
Manual Conventions..........................................................................................6
Customer Support ...........................................................................................................7
Chapter Two: Installation ...........................................................................................................9
How To Unpack the Type 649 Unit................................................................................9
Opening the Package .........................................................................................9
Unpacking Checklist..........................................................................................10
Interface Cables ..............................................................................................................11