MKS 649B - Page 82

Model Code Appendix B: Model Code Explanation
50
Gas Code (GGG)
The gas code is indicated by a three digit code.
Gas Code Ordering Code
Helium 001
Argon 004
Hydrogen 007
Nitrogen 013
Full Scale Pressure Range (XXX)
The full scale pressure range is indicated by a two digit/one letter code.
Full Scale Pressure Range Ordering Code
10 Torr [1.33 x 10
3
Pa] 11T
20 Torr [2.66 x 10
3
Pa] 21T
50 Torr [6.66 x 10
3
Pa] 51T
100 Torr [1.33 x 10
4
Pa] 12T
1000 Torr [1.33 x 10
5
Pa] 13T
Flow Rate Full Scale (YYY)
The flow rate full scale is indicated by a two digit/one letter code.
Flow Rate Full Scale Ordering Code
10 sccm 11C
20 sccm 21C
50 sccm 51C
100 sccm 12C
200 sccm 22C
500 sccm 52C
1000 sccm 13C
2000 sccm 23C
5000 sccm 53C