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SEREN R301 User Manual

SEREN R301
58 pages
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SEREN
INDUSTRIAL POWER SYSTEMS INC.
R301
RADIO FREQUENCY
POWER SUPPLY
OPERATOR’S MANUAL
Revision: 0.05
Standard Configuration
PRELIMINARY
SERIAL INTERFACE NOT IMPLEMENTED
Document Number 6100130000
SEREN Industrial Power Systems, Inc.
1717 Gallagher Drive
Vineland, New Jersey, 08360
U.S.A
Telephone: 856-205-1131
Fax: 856-205-1141
E-mail: info@serenips.com
Copyright ã 2003, 2004 Seren IPS Inc.
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SEREN R301 Specifications

General IconGeneral
BrandSEREN
ModelR301
CategoryPower Supply
LanguageEnglish

Summary

Introduction

Information, Service, and Contact

Guidance for inquiries, service procedures, and contact details for support.

Proprietary Information Notice

States that the document contains proprietary information and restrictions.

Safety Notes

General Safety Precautions and Symbols

Essential safety instructions and explanations of safety symbols used in the manual.

Product Features

R301 RF Power Supply Capabilities

Highlights key features and capabilities of the R301 RF Power Supply.

Physical Dimensions

Unit Views and Dimensions

Illustrates front and side views of the unit with critical dimensions.

Rear View Dimensions

Displays the rear view of the unit with relevant dimensions.

Installation and Connections

Mounting, Accessories, and AC Connection

Guidance on unit mounting, accessories, and crucial AC mains connection precautions.

RF Output and System Interfacing

RF Output and Interface Connector Overview

Instructions for RF output connection and overview of system interfacing connectors.

Front Panel Controls

Buttons and Display Layout

Describes front panel buttons, their functions, and the overall display layout.

Front Panel Display Information

Display Lines Explained

Explains the content and meaning of each line on the front panel display.

Operation - Basic Front Panel

Power, Control Source, and Leveling Modes

Guides on initial operation, power, control source selection, and leveling mode.

Operation - Basic Front Panel (continued)

Power Level and RF Output Control

Covers setting output power levels and enabling/disabling RF output.

Analog Interface Operation

Analog Control Mode Configuration Steps

Step-by-step guide to selecting and configuring the analog control mode.

Serial Interface Operation

Serial Control Mode and Baud Rate Setup

Instructions for selecting serial mode and configuring the baud rate.

Serial Command Reference

Command Syntax, Structure, and Responses

Explains serial command syntax, prompts, and status response mapping.

Configuring Programmable Parameters

Navigating the Programming Menu

Instructions for entering and navigating the unit's programming menu.

Programmable Parameter Reference

Parameter Settings Overview Chart

A chart detailing programmable parameters, display options, and available settings.

Programmable Parameter Details

Control Source Parameter Details

Detailed explanation of the Control Source parameter and its options.

Rear Panel Connections Overview

RF Output Connector Details

Details the RF output connector and its connection requirements.

Rear Panel Connections (continued)

Power, Exciter, and DCP Connectors

Covers power inlet, circuit breaker, exciter, and optional DCP connectors.

Rear Panel Connections (continued)

Analog Interface Connector Pinout

Comprehensive pinout and description of the 25-pin D-Sub analog interface connector.

Typical Interface Circuits

RFENABLED* Output Circuit Diagram

Circuit diagram for the RF output status signal.

Typical Interface Circuits (continued)

TTL-Compatible Input Circuit Diagrams

Circuit diagrams for various TTL-compatible input signals.

Typical Interface Circuits (continued)

Setpoint and Feedback Input Circuit Diagrams

Circuit diagrams for SETPOINT and FEEDBACK input signals.

Typical Interface Circuits (continued)

Monitor Output Circuit Diagram

Circuit diagram for the monitor output signal.

Typical Interface Connections

Analog Control Wiring Diagram

Diagram illustrating typical analog interface wiring for system control.

External Feedback Options

Probe Inverter Connection Diagram

Shows how to connect the probe inverter for negative feedback signals.

External Feedback with AT-Series Networks

AT-Series Matching Network Feedback Integration

Explains feedback integration with AT-Series matching networks and MC2 controller.

Typical System Configuration

Basic Plasma System Setup Diagram

Diagrams a basic plasma processing system configuration using the R301.

Maintenance and Cleaning

Cleaning Procedures

Provides instructions for safely cleaning the unit's exterior.

Troubleshooting

Problem Solving Chart

Lists common issues and their suggested solutions for the R301 unit.

Technical Data

AC Input and Power Cord Specifications

Details AC input power requirements and supplied power cord specifications.

Technical Data (continued)

Output and Environmental Specifications

Lists technical parameters for RF output, environment, cooling, and dimensions.

Warranty Information

Warranty Coverage, Exclusions, and Service

Outlines warranty terms, exclusions, and procedures for obtaining service.

Glossary of Terms

Technical Terminology Definitions

Defines common technical terms used throughout the manual.

Glossary of Terms (continued)

Technical Terminology Definitions

Continues the definition of technical terms used in the manual.

Revision History

Manual Revision Log

Lists the revision history of the operator's manual.