VAT 651 Series - Close Valve; Open Valve; Position Control; Pressure Control

Series 651 OPERATION
605451EC Edition 2014-07-10 65/
99
5.2 Close valve
Local operation:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation:
(Refer to chapter «Digital inputs» for details)
Push CLOSE button Send CLOSE VALVE
5.3 Open valve
Local operation:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation:
(Refer to chapter «Digital inputs» for details)
Push OPEN button Send OPEN VALVE
5.4 Position control
The valve position is directly controlled according to the position setpoint.
Local operation
:
(‘Control View’, ‘Control Performance Analyzer’ or
‘Service Box 2‘)
Remote operation
:
(Refer to chapter «Digital inputs» and «Analog
inputs and outputs» for details)
Select or enter position setpoint
1. Set CONTROL MODE to POSITION
CONTROL
2. Set position SETPOINT
In case CLOSE VALVE, OPEN VALVE or HOLD is also set these have higher
priority.
5.5 Pressure control
To prepare valve for PRESSURE CONTROL perform complete «Setup procedure».
The valve has parameters that may be modified to tune pressure control
performance. Refer to «Tuning of control performance».
The included PID controller controls the chamber pressure according to the pressure setpoint by means
of the valve position. The PID controller works with an adaptive algorithm to achieve best results under
altering conditions (gasflow, gas type).
Local operation
:
(‘Control View’, ‘Control Performance Analyzer’
or ‘Service Box 2‘)
Remote operation
:
(Refer to chapter «Digital inputs» and «Analog
inputs and outputs» for details)
Select or enter pressure setpoint
1. Set CONTROL MODE to PRESSURE
CONTROL
2. Set pressure SETPOINT
In case CLOSE VALVE, OPEN VALVE or HOLD is also set these have higher
priority.