VAT 651 Series - Pressure Control Configuration Options

Series 651 INSTALLATION
605451EC Edition 2014-07-10 43/
99
4.5.2 Pressure control configuration
Select the configuration what your application needs.
System Configuration
Constant gas flow available
Constant gas flow not
available
Tv*<= 500 sec Tv* > 500 sec
Adaptive pressure
controller
(Refer to chapter:
Pressure controller)
Fixed pressure controller
(Refer to chapter: Pressure controller)
Fixed pressure controller
(Refer to chapter: Pressure controller)
Soft Pump Soft Pump (Refer to chapter: Pressure controller)
Use the formula below to define the applicable pressure control algorithm.
q
L
gasflow for learn [mbarl/s]
p
SFS
sensor full scale pressure [mbar]
Tv* Vacuum time constant [sec]
CV Chamber Volume [l]
P
SFS
•
••
• CV
Tv =
q
L
Upstream
Process
chamber
Control
valve
Pump
Downstream
Process
chamber
Control
valve
Pump