Advanced Energy FC-77 Series User Manual

6-22 Specifications and Reference Information 5700512-C
Advanced Energy
®
Specifications for Model FC-796 MFCs
The following table lists specifications for the FC-796 MFCs.
Table 6-21. Specifications for FC-796 series MFCs
Specification FC-796 FC-796C
Full-scale range (N
2
equivalent) 6 slm to 30 slm
6 slm to 50 slm
Valve type Normally open Normally closed
Response time Maximum ±2% of full scale, within 1 s
Accuracy
Note 1
Maximum ±1% of full scale
Linearity Maximum ±0.5% of full scale
Repeatability Maximum at ±0.2% of full scale
External leak rate Maximum 1 x 10
-11
[Pa*m
3
/sec(He)]
Flow rate control range 2% to 100%
Operating pressure
range
In 69 to 275 kPa(G); 10 to
40 psi(G)
Note 3
69 to 275 kPa(G); 10 to
40 psi(G)
Note 4
Out Atmosphere to vacuum 0 kPa(G), 0 kPa(A)
Proof pressure
Note 2
981 kPa(G); 142 psi(G)
Operating temperature 5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal 0 VDC to 5.0 VDC
Supply power Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Power consumption Maximum 3.1 W
Gas-wetted surface material SUS316, SUS316L, PCTFE
Standard fitting Equivalent to 1/4″ VCR
Mounting position Any direction
Weight 1 kg (2.2 lb)
Options Current output (0 mA to 2.5 mA), error detection function,
TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—98 to 275 kPa(G) [14 to 40 psi(G)] when the full-scale (N
2
equivalent) is over 10 slm and less
than 30 slm. 147 to 275 kPa(G) [21 to 40 psi(G)] when the full-scale (N
2
equivalent) is 30 slm.
Note 4—98 to 275 kPa(G) [14 to 40 psi(G)] when the full-scale (N
2
equivalent) is over 10 slm and less
than 30 slm. 147 kPa(G) to 275 kPa(G)) when the full-scale (N
2
equivalent) is from 30 slm to 50 slm.

Advanced Energy FC-77 Series Specifications

General

Brand	Advanced Energy
Model	FC-77 Series
Category	Controller
Language	English