Advanced Energy FC-77 Series User Manual

5-2 Troubleshooting and Global Customer Support 5700512-C
Advanced Energy
®
NO GAS IS BEING SUPPLIED
Use the following flow chart to troubleshoot if no gas is being supplied. If these
procedures do not resolve the problem, contact AE Global Services (see “AE Global
Services” on page 5-6).
Figure 5-1. No Gas Is Being Supplied troubleshooting flow chart
Check the pressure
on the cylinder or
factory piping.
Not OK
Replace the cylinder or
adjust the pressure.
OK
Check gas input
pressure.
Not OK
OK
Check the gas
passage to the
MFC.
Adjust to specified input
pressure or to maintain a
proper pressure differential
for MFC operation.
Check control valves for the
gas supply, MFC, and
chamber.
Not OK
OK
Check the pressure
on the pneumatic
control valve.
The pneumatic control valve
will not open without the
specified pressure. Adjust to
specifications.
Not OK
OK
Perform an overall leak
check on the system and
MFC.
Repair any leaks.Not OK

Advanced Energy FC-77 Series Specifications

General

Brand	Advanced Energy
Model	FC-77 Series
Category	Controller
Language	English