6-28 Specifications and Reference Information 5700512-C
Advanced Energy
®
Specifications for Model FC-7820 MFCs
The following table lists specifications for the FC-7820 MFCs.
Table 6-27. Specifications for FC-7820 series MFCs
Specification FC-7820 FC-7820C
Full-scale range (N
2
equivalent) 35 slm to 150 slm
Valve type Normally open Normally closed
Response time Maximum ±2% of full scale, within 4 s
Accuracy
Note 1
Maximum ±2% of full scale
Linearity Maximum ±1% of full scale
Repeatability Maximum at ±0.2% of full scale
External leak rate Maximum 1 x 10
-11
[Pa*m
3
/sec(He)]
Flow rate control range 2% to 100%
Operating pressure range 147 to 275 kPa(D); 21 to 40 psi(D)
Proof pressure
Note 2
981 kPa(G); 142 psi(G)
Operating temperature 5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal 0 VDC to 5.0 VDC
Supply power Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 220 mA
Power consumption Maximum 3.7 W
Gas-wetted surface material
Note 3
SUS316, SUS316L, PTFE, KM-45
Standard fitting
Note 4
1/4″ VCR, 3/8″ VCR
Mounting position Any direction
Weight 2.8 kg (6.2 lb)
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—PTFE, Viton, or chloroprene rubber may be required, depending on the intended flow rate range.
Note 4—3/8″ VCR fitting or 3/8″ UJR fitting is required if 100 slm or more is derived from full-scale
range (N
2
equivalent).
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