5700512-C Installation and Operation 3-11
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
MAINTENANCE
Recalibration and repair should be performed by Advanced Energy. See “AE Global
Services” on page 5-6 for contact information.
Note: Removal of an MFC should be done only after adequate purging with a
nonreactive gas such as nitrogen gas (N
2
). You should follow your company
procedures for removing gas line components.
STORAGE
Observe the following requirements when placing an MFC in storage:
• Temperature between 5ºC (41ºF) and 45ºC (113ºF)
• Relative humidity less than 60%
Additionally, prevent any mechanical impact or corrosion.
Reactive gas calibrated MFCs may receive severe contamination or
corrosion from exposure to air or moisture. Check plumbing for leaks,
and purge thoroughly with dry nitrogen before operating or
disconnecting from the system.
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