Advanced Energy FC-77 Series User Manual

6-24 Specifications and Reference Information 5700512-C
Advanced Energy
®
Specifications for Model FC-7710 MFCs
The following table lists specifications for the FC-7710 MFCs.
Table 6-23. Specifications for FC-7710 series MFCs
Specification FC-7710 FC-7710C FC-7710CD FC-7710CU
Full-scale range (N
2
equivalent) 6 slm to
20 slm
6 slm to
50 slm
6 slm to 30 slm
Valve type Normally
open
Normally closed
Response time Maximum ±2% of full scale, within 2 seconds
Accuracy
Note 1
Under 20 slm, maximum ±1% of full scale; over 20 slm, maxi-
mum of ±2% of full scale
Linearity Under 20 slm, maximum ±0.5% of full scale; over 20 slm, maxi-
mum of ±1% of full scale
Repeatability Maximum at ±0.2% of full scale
External leak rate Maximum 1 x 10
-7
[Pa*m
3
/sec(He)]
Flow rate control range 5% to 100%
2% to 100%
Operating pressure range 69 to 275 kPa(D); 10 to 40 psi(D)
Proof pressure
Note 2
981 kPa(G); 142 psi(G)
Operating temperature 5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal 0 VDC to 5.0 VDC
Supply power Minimum +15 VDC ±2% 25 mA,
Minimum -15 VDC ±2% 180 mA
Power consumption Maximum 3.1 W
Gas-wetted surface material SUS316, SUS316L, KM-45, Viton, or Chloroprene rubber
Standard fitting 1/4″ VCR, 1/4″ SW
Equivalent to 1/4″ VCR,
1/4″ SW
Mounting position Any direction
Weight 0.9 kg (2.0 lb)
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service
gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified
operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.

Advanced Energy FC-77 Series Specifications

General

Brand	Advanced Energy
Model	FC-77 Series
Category	Controller
Language	English