Advanced Energy FC-77 Series User Manual

6-30 Specifications and Reference Information 5700512-C
Advanced Energy
®
Specifications for Model FC-7810 MFCs
The following table lists specifications for the FC-7810 MFCs.
Table 6-29. Specifications for FC-7810 series MFCs
Specification FC-7810 FC-7810C FC-7810CD, FC-
7810CU
Full-scale range (N
2
equivalent) 6 slm to 30 slm
6 slm to 50 slm 6 slm to 30 slm
Valve type Normally open Normally closed
Response time Maximum ±2% of full scale, within 2 seconds
Accuracy
Note 1
Under 20 slm, maximum ±1% of full scale; over 20 slm, maximum of
±2% of full scale
Linearity Under 20 slm, maximum ±0.5% of full scale; over 20 slm, maximum
of ±1% of full scale
Repeatability Maximum at ±0.2% of full scale
External leak rate Maximum 1 x 10
-11
[Pa*m
3
/sec(He)]
Flow rate control range 5% to 100%
Operating pressure range 69 to
275 kPa(D); 10
to 40 psi(D)
≥ 20 slm: 147 to
275 kPa(D); 21to
40 psi(D)
69 to
275 kPa(D); 10
to 40 psi(D
≥20 slm: 98 to
294 kPa(D); 14
to 43 psi(D)
69 to 275 kPa(D); 10 to 40
psi(D
≥20 slm: 98 to 275 kPa(D);14
to 40 psi(D)
Proof pressure
Note 2
981 kPa(G); 142 psi(G)
Operating temperature 5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal 0 VDC to 5.0 VDC
Supply power Minimum +15 VDC ±2% 25 mA,
Minimum -15 VDC ±2% 180 mA
Power consumption Maximum 3.1 W
Gas-wetted surface material
Note 3
SUS316, SUS316L, PTFE, Ni, KM-45, Viton, Chloroprene rubber
Standard fitting 1/4″ VCR 1/4″ VCR,
1/4″ SW
Equivalent to 1/4″ VCR
Mounting position Any direction
Weight 1.5 kg (3.3 lb)
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service gas
and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified operat-
ing pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—Use of Viton or Chloroprene rubber may be required, depending on the intended flow rate range

Advanced Energy FC-77 Series Specifications

General

Brand	Advanced Energy
Model	FC-77 Series
Category	Controller
Language	English