3-6 Installation and Operation 5700512-C
Advanced Energy
®
Testing the System for Leaks
After installing the MFC in your system, you should test the leak integrity of the gas
connections with a helium leak detector.
Note: MFCs equipped with a normally closed control valve should be leak tested with
the valve open (by providing a set point voltage to the MFC). For more
information about setting the set point voltage, see Chapter 4, “I/O Connections
and Communication.”
CONNECTING THE MFC TO PERIPHERAL
EQUIPMENT
The following illustrations provide guidance for connecting a MFC to peripheral
equipment. The illustrations list Aera part numbers for equipment.
Figure 3-1. Connection to peripheral equipment using a RO-Box power
supply
Do not use liquid leak detectors to leak test connections. They may
damage the MFC.
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