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Advanced Energy FC-77 Series - User Manual

Advanced Energy FC-77 Series
106 pages
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Mass Flow Controllers
Series FC-77X / 77XX, Series FC-78X / 78XX, and
Series FC-79X
AERA PRODUCTS
June 2006 5700512-C
User Manual

Table of Contents

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Advanced Energy FC-77 Series Specifications

General IconGeneral
Accuracy±1% of Full Scale
Storage Temperature Range-20°C to 70°C
Cooling MethodNatural Convection
TypeMass Flow Controller
Response Time<1 second
Operating PressureUp to 150 psig
Operating Temperature5°C to 50°C
Communication InterfaceAnalog (0-5 VDC or 4-20 mA)
SealsViton
Operating Temperature Range5°C to 50°C
Protection Featuresreverse polarity protection
DimensionsVaries by model
WeightVaries by model
Gas CompatibilityWide range of gases, consult factory for specific gas compatibility

Summary

Safety and Product Compliance Guidelines

IMPORTANT SAFETY INFORMATION

Essential safety notices for safe installation and operation.

MODEL NUMBERS FOR THIS MANUAL

Lists the MFC model numbers covered in the manual.

INTERPRETING THE MANUAL

Explains document conventions, danger, warning, and caution boxes.

Danger, Warning, and Caution Boxes

Explains symbols indicating hazard levels and their meaning.

Interpreting Product Labels

Describes the meaning of various labels found on the unit.

SAFETY GUIDELINES

Provides critical guidelines for safe installation and operation of the MFC.

Product Certification

Lists certifications applicable to the product options.

Conditions of Use

Outlines requirements for complying with directives and standards.

Product Overview

PRODUCT DESCRIPTION AND THEORY OF OPERATION

Describes the MFC and its fundamental operating principles.

MFC COMPONENTS

Details the main components of the MFC, including sensor, bypass, and valve.

Flow Sensor Assembly

Explains how the flow sensor measures gas flow using thermal principles.

Bypass Assembly

Describes the function of the bypass assembly in diverting gas streams.

Electronics Assembly

Outlines the components of the electronics assembly for MFC control.

Valve Assembly

Describes the solenoid control valve used in the MFC.

Installation and Operation

PREPARING TO INSTALL THE UNIT

Provides essential information before proceeding with MFC installation.

Installation Requirements

Lists the necessary requirements for installing the MFC correctly.

INSTALLING THE UNIT

Guides the user through the steps for installing the MFC unit.

Overview of Unit Installation

Provides a step-by-step overview of the MFC installation process.

Confirming the MFC Model

Instructions to verify the correct MFC model for system requirements.

Preparing the Installation Site

Details site preparation steps, including cleaning and purging.

Unpacking the MFC

Guidance on carefully unpacking and inspecting the MFC unit.

Positioning the MFC

Instructions on how to orient and position the MFC during installation.

Mounting the MFC

Steps for physically mounting the MFC to the installation surface.

Making the Mechanical Connections

Procedures for connecting the MFC to the gas supply line.

Making the Electrical Connection

Steps for establishing the electrical connections for the MFC.

POWER SUPPLY REQUIREMENTS

Specifies the requirements for the MFC power supply.

GROUND CONNECTIONS

Explains the importance and procedure for proper grounding.

Testing the System for Leaks

How to perform leak testing on the MFC system.

CONNECTING THE MFC TO PERIPHERAL EQUIPMENT

Guidance on connecting the MFC to external equipment.

First-Time Operation

Steps for initial operation of the MFC after installation.

Zeroing the MFC

Procedure for adjusting the MFC to its zero point.

I;O Connections and Communication

20-PIN CARD EDGE CONNECTOR AND 20-PIN HONDA CONNECTOR

Details for the 20-pin connectors used for I/O and communication.

Card Edge Connector

Information about the 20-pin card edge connector and its pinout.

Honda Connector

Information about the 20-pin Honda connector and its pinout.

20-Pin Connector Signal Descriptions

Detailed descriptions of signals for the 20-pin connectors.

9-PIN SUBMINIATURE-D CONNECTOR

Details for the 9-pin subminiature-D connector.

Pin and Signal Descriptions

Detailed descriptions of pins and signals for the 9-pin connector.

SPECIAL FUNCTION SIGNAL DESCRIPTIONS

Information on signals dedicated to specific MFC functions.

Alarm Output (Error Detection) Signals

Explains alarm signals used for error detection in MFCs.

Control Valve Purge Function Signals

Details on using the control valve for purging gas.

CARD EDGE PURGE FUNCTION SIGNALS

Purge function signals specific to the card edge connector.

HONDA 20-PIN PURGE FUNCTION SIGNALS

Purge function signals specific to the Honda 20-pin connector.

SUBMINIATURE-D PURGE FUNCTION SIGNAL

Purge function signals for the 9-pin subminiature-D connector.

Troubleshooting and Global Customer Support

TROUBLESHOOTING

Provides guidance for resolving common MFC issues.

NO GAS IS BEING SUPPLIED

Troubleshooting flowchart for when no gas is being supplied to the MFC.

SET POINT AND FLOW OUTPUT DO NOT MATCH

Troubleshooting flowchart for discrepancies between set point and flow output.

UNSTABLE FLOW OR INSUFFICIENT OUTPUT EXISTS

Troubleshooting flowchart for unstable or insufficient MFC output.

AE WORLD WIDE WEB SITE

Information on accessing Advanced Energy's website for product details.

AE GLOBAL SERVICES

Contact information for AE Global Services for support.

USA Support Locations

Lists support locations within the USA.

European Sales and Service Contacts

Contact details for sales and service in Europe.

Middle East Sales and Service Contacts

Contact details for sales and service in the Middle East.

Asian Sales and Service Contacts

Contact details for sales and service in Asia/Pacific Rim.

RETURNING MFCS FOR REPAIR

Procedures for returning MFCs for repair or adjustment.

Packing an MFC for Shipping

Instructions on how to properly pack an MFC for shipment.

WARRANTY

Information regarding the product warranty.

Authorized Returns

Details on the process for authorized product returns.

Warranty Statement

The formal warranty statement for the MFC products.

Specifications and Reference Information

MODEL SPECIFICATIONS

Lists detailed specifications for various MFC models.

Specifications for Model FC-770 MFCs

Detailed specifications for FC-770 series MFC models.

Specifications for Model FC-771 MFCs

Detailed specifications for FC-771 series MFC models.

Specifications for Model FC-772 MFCs

Detailed specifications for FC-772 series MFC models.

Specifications for Model FC-780 HT MFCs

Detailed specifications for FC-780HT series MFC models.

Specifications for Model FC-780 MFCs

Detailed specifications for FC-780 series MFC models.

Specifications for Model FC-780 X MFCs

Detailed specifications for FC-780X series MFC models.

Specifications for Model FC-781 HT MFCs

Detailed specifications for FC-781HT series MFC models.

Specifications for Model FC-781 MFCs

Detailed specifications for FC-781 series MFC models.

Specifications for Model FC-782 MFCs

Detailed specifications for FC-782 series MFC models.

Specifications for Model FC-785 MFCs

Detailed specifications for FC-785 series MFC models.

Specifications for Model FC-785 T-B MFCs

Detailed specifications for FC-785T-B series MFC models.

Specifications for Model FC-785 X-B MFC

Detailed specifications for FC-785X-B MFC models.

Specifications for Model FC-785 Y-B MFCs

Detailed specifications for FC-785Y-B series MFC models.

Specifications for Model FC-786 MFCs

Detailed specifications for FC-786 series MFC models.

Specifications for Model FC-786 T-B MFCs

Detailed specifications for FC-786T-B series MFC models.

Specifications for Model FC-786 Y-B MFCs

Detailed specifications for FC-786Y-B series MFC models.

Specifications for Model FC-790 MFCs

Detailed specifications for FC-790 series MFC models.

Specifications for Model FC-791 MFCs

Detailed specifications for FC-791 series MFC models.

Specifications for Model FC-795 MFCs

Detailed specifications for FC-795 series MFC models.

Specifications for Model FC-795 T-B MFCs

Detailed specifications for FC-795T-B series MFC models.

Specifications for Model FC-796 MFCs

Detailed specifications for FC-796 series MFC models.

Specifications for Model FC-7700 MFCs

Detailed specifications for FC-7700 series MFC models.

Specifications for Model FC-7710 MFCs

Detailed specifications for FC-7710 series MFC models.

Specifications for Model FC-7720 MFCs

Detailed specifications for FC-7720 series MFC models.

Specifications for Model FC-7800 MFCs

Detailed specifications for FC-7800 series MFC models.

Specifications for Model FC-7810 MFCs

Detailed specifications for FC-7810 series MFC models.

Specifications for Model FC-7820 MFCs

Detailed specifications for FC-7820 series MFC models.

Specifications for Model FC-7850 Y-B MFCs

Detailed specifications for FC-7850Y-B series MFC models.

Specifications for Model FC-785 Y-B MFCs

Detailed specifications for FC-785Y-B series MFC models.

MFC DIMENSIONS

Provides physical dimensions for various MFC models.

Dimensions for Standard MFC Models

Displays physical dimensions for standard MFC model numbers.

Dimensions For Block-Type MFC Models

Provides physical dimensions for block-type MFC model numbers.

Dimensions for High Temperature MFC Models

Displays physical dimensions for high temperature MFC models.

REFERENCE INFORMATION

Contains calibration references and MFC label information.

Calibration References

Details calibration methods, conditions, and traceability.

FLOW INDICATION

Explains how flow rate is indicated and units used.

Product Label

Describes the information displayed on the MFC product label.

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