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Advanced Energy FC-77 Series User Manual

Advanced Energy FC-77 Series
106 pages
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Mass Flow Controllers
Series FC-77X / 77XX, Series FC-78X / 78XX, and
Series FC-79X
AERA PRODUCTS
June 2006 5700512-C
User Manual

Table of Contents

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Advanced Energy FC-77 Series Specifications

General IconGeneral
Accuracy±1% of Full Scale
Storage Temperature Range-20°C to 70°C
Cooling MethodNatural Convection
TypeMass Flow Controller
Response Time<1 second
Operating PressureUp to 150 psig
Operating Temperature5°C to 50°C
Communication InterfaceAnalog (0-5 VDC or 4-20 mA)
SealsViton
Operating Temperature Range5°C to 50°C
Protection Featuresreverse polarity protection
DimensionsVaries by model
WeightVaries by model
Gas CompatibilityWide range of gases, consult factory for specific gas compatibility

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