6-32 Specifications and Reference Information 5700512-C
Advanced Energy
®
Specifications for Model FC-7850Y-B MFCs
The following table lists specifications for the FC-7850Y-B MFCs.
Table 6-31. Specifications for FC-7850Y-B series MFCs
Specification FC-7850Y-B FC-7850CY-B
Full-scale range (N
2
equivalent) 10 sccm to 5000 sccm
Valve type Normally open Normally closed
Response time Maximum ±2% of full scale, within 2 s
Accuracy
Note 1
Maximum ±1% of full scale
Linearity Maximum ±0.5% of full scale
Repeatability Maximum at ±0.2% of full scale
External leak rate Maximum 1 x 10
-11
[Pa*m
3
/sec(He)]
Flow rate control range 5% to 100%
Operating pressure range 49 to 275 kPa(D); 7 to 40 psi(D)
Proof pressure
Note 2
981 kPa(G); 142 psi(G)
Operating temperature 5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal 0 VDC to 5.0 VDC
Supply power Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Power consumption Maximum 3.1 W
Gas-wetted surface material SUS316, SUS316L, PTFE, KM-45
Mounting position Any direction
Weight 1.3 kg (2.9 lb)
Options TC surface treatment
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC
in temperature is obtained for the primary reference in the specified operating pressure range. If the ser-
vice gas and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the
specified operating pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
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