3-2 Installation and Operation 5700512-C
Advanced Energy
®
• The MFC can be mounted in any position, but the zero point may shift if the MFC
is in a nonvertical position.
Adjust the zero point in the intended mounting position (see “Zeroing the MFC”
on page 3-9 for more information).
• AE recommends that you use a filter on the MFC primary side. A clogged MFC
can result in inaccurate control and measurement and subsequent process failures.
• AE recommends that you use a dedicated regulator on the MFC primary side.
Excessive service pressure can cause control errors and MFC failure. Unstable
pressure (or multiple MFCs below a single regulator) can cause unstable output.
INSTALLING THE UNIT
The following sections explain how to install the unit.
Overview of Unit Installation
To install the MFC, do the following:
1. “Confirming the MFC Model” on page 3-3.
2. “Preparing the Installation Site” on page 3-3.
3. “Unpacking the MFC” on page 3-3.
4. “Positioning the MFC” on page 3-3.
5. “Mounting the MFC” on page 3-4.
6. “Making the Mechanical Connections” on page 3-4
7. “Making the Electrical Connection” on page 3-5.
8. “Testing the System for Leaks” on page 3-6.
Hazardous voltages exist inside the mass flow controller (MFC). Do not
remove the MFC cover.
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