5700512-C Troubleshooting and Global Customer Support 5-1
Chapter
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Chapter
5
Troubleshooting and Global
Customer Support
TROUBLESHOOTING
The following sections provide information on troubleshooting the MFC as well as
AE Global Services contact information.
Alarm Signals
Some MFCs provide alarm output under certain operating conditions. For more
information, see “Alarm Output (Error Detection) Signals” on page 4-7.
Troubleshooting the Gas Flow
This section provides information on responding to the following flow-related
problems:
• “No Gas Is Being Supplied” on page 5-2.
• “Set Point and Flow Output Do Not Match” on page 5-3.
• “Unstable Flow or Insufficient Output Exists” on page 5-4.
Hazardous voltages exist inside the mass flow controller (MFC). Do not
remove the MFC cover.
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