Advanced Energy FC-77 Series User Manual

5700512-C Troubleshooting and Global Customer Support 5-5
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Figure 5-3. Unstable Flow or Insufficient Output Exists troubleshooting flow
chart
Check for stable pressure
on both the inlet and outlet
sides of the MFC.
Not OK
Ensure that pressure is stable on
inlet and outlet sides.
OK
Check that the pressure
differential between the
inlet and outlet sides of the
MFC is correct.
Not OK
OK
Check whether MFC is
being used with specified
gas.
Adjust pressure to meet pressure
differential specifications. See the
"Specifications" section in
Chapter 6.
Using a gas other than the one
specified for the MFC may cause
hunting. Reducing the pressure
differential across the MFC may
eliminate this problem.
Not OK
OK
Check for interference with
the pressure regulator.
Check the operation timing and
piping design. Also check the
constants used with the pressure
regulator.
Not OK
OK
Check for interference
between the pressure
regulator and other MFCs.
Check the operation timing and
piping for all related MFCs.
Not OK
OK
Check whether a
temperature gradient may
be causing vapor
condensation in the piping.
Vapor condensation may cause
output fluctuations. To prevent
condensation, check the
temperature control on the piping
and/or shorten the piping.
Not OK
OK
Perform an overall leak
check on the system and
MFC.
Leaks from the piping may cause
output fluctuation. See the "Leak
Check" section in Chapter 3.
Not OK

Advanced Energy FC-77 Series Specifications

General

Brand	Advanced Energy
Model	FC-77 Series
Category	Controller
Language	English