6-10 Specifications and Reference Information 5700512-C
Advanced Energy
®
Specifications for Model FC-782 MFCs
The following table lists specifications for the FC-782 MFCs.
Table 6-9. Specifications for FC-782 series MFCs
Specification FC-782 FC-782C
Full-scale range (N
2
equivalent) 35 slm to 150 slm
Valve type Normally open Normally closed
Response time Within 3 s (typical), ±2%
Accuracy
Note 1
Maximum ±2% of full scale
Linearity Maximum ±1% of full scale
Repeatability Maximum at ±0.2% of full scale
External leak rate Maximum 1 x 10
-11
[Pa*m
3
/sec(He)]
Flow rate control range 2% to 100%
Operating pressure range 147 to 275 kPa(D); 21 to 40 psi(D)
Proof pressure
Note 2
981 kPa(G); 142 psi(G)
Operating temperature 5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal 0 VDC to 5.0 VDC
Supply power Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 220 mA
Power consumption Maximum 3.7 W
Gas-wetted surface material
Note 3
SUS316, SUS316L, PTFE, KM-45
Standard fitting
Note 4
1/4″ VCR, 3/8″ VCR, 1/4″ UJR, 3/8″ UJR
Mounting position Any direction
Weight 2.8 kg (6.2 lb)
Options Current output (0 mA to 2.5 mA), error detection function
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service gas
and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified operat-
ing pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—Use of PTFE, Viton, or Chloroprene rubber may be required depending on the intended flow rate
range.
Note 4—3/8″ VCR or 3/8″ UJR fitting is required if 100 slm or more is derived from full-scale range N
2
equivalent.
To Next Page
Loading...
Need help?
General
