Advanced Energy FC-77 Series User Manual

5700512-C Specifications and Reference Information 6-15
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Specifications for Model FC-786 MFCs
The following table lists specifications for the FC-786 MFCs.
Table 6-14. Specifications for FC-786 series MFCs
Specification FC-786 FC-786C
Full-scale range (N
2
equivalent) 6 slm to 30 slm
6 slm to 50 slm
Valve type Normally open Normally closed
Response time Maximum ±2% of full scale, within 1 s
Accuracy
Note 1
Under 20 slm, maximum ±1% of full scale (over 20 slm, maximum,
±2% of full scale)
Linearity Under 20 slm, maximum ±0.5% of full scale (over 20 slm, maximum
±1% of full scale)
Repeatability Maximum at ±0.2% of full scale
External leak rate Maximum 1 x 10
-11
[Pa*m
3
/sec(He)]
Flow rate control range 2% to 100%
Operating pressure range 69 to 275 kPa(D); 10 to
40 psi(D)
≥20 slm: 147 to 275 kPa(D); 21
to 40 psi(D)
69 to 275 kPa(D); 10 to
40 psi(D)
≥20 slm: 98 to 275 kPa(D); 14 to
40 psi(D)
Proof pressure
Note 2
981 kPa(G); 142 psi(G)
Operating temperature 5ºC to 45ºC (41ºF to 113ºF)
Flow rate setting and output signal 0 VDC to 5.0 VDC
Supply power Minimum +15 VDC ±2% 25 mA
Minimum -15 VDC ±2% 180 mA
Power consumption Maximum 3.1 W
Gas-wetted surface material
Note 3
SUS316, SUS316L, PTFE, Ni, KM-45
Standard fitting Equivalent to 1/4″ VCR
Mounting position Any direction
Weight 1.0 kg (2.2 lb)
Options Current output (0 mA to 2.5 mA), error detection function,
electropolishing
Note 1—Accuracy ensures that the calibration gas equivalent flow is ±1% of full scale when 22 ± 3ºC in
temperature is obtained for the primary reference in the specified operating pressure range. If the service gas
and calibration gas are the same, the measured gas is ensured to be ±1% of full scale in the specified operat-
ing pressure range as to our primary reference.
Note 2—The proof pressure specification does not ensure operation or accuracy.
Note 3—Use of Viton or Chloroprene rubber may be required depending on the intended flow rate range.

Advanced Energy FC-77 Series Specifications

General

Brand	Advanced Energy
Model	FC-77 Series
Category	Controller
Language	English