5700512-C Product Overview 2-1
Chapter
Series FC-77X / 77XX, Series FC-78X / 78XX, and Series FC-79X MFCs
Chapter
2
Product Overview
PRODUCT DESCRIPTION AND THEORY OF
OPERATION
The MFC provides analog control, an array of possible mechanical and electrical
connections, and a wide variety of flow ranges. As shown in Figure 2-1, the MFC
(mass flow controller) is composed of a PC board that is integrated with the following
sections:
• Flow and temperature sensor
•Bypass
• Electronics
• Control valve
Figure 2-1. MFC cutaway view
PC board
Sensor
Control
Gas outlet
Base
Bypass
Gas inlet
Valve
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