198 Troubleshooting and Maintenance Manual
9 Replacement Parts
8 Lens insulator (one piece) G3170-20530
Inert EI 350 Anodized Repeller assembly G3170-60171
7 Screws for filament G1999-20021
6 Source heater assembly G3170-60177
2 Setscrew for lens stack G1999-20021
1 Source body G7000-20130
Table 1 9 Inert EI ion source (continued)
Description Part number