General Troubleshooting 2
Troubleshooting and Maintenance Manual 45
• Mass filter (quad) temperature sensor is open (either front or rear quad)
• Mass filter (quad) temperature sensor is shorted (either front or rear quad)
• No heater voltage (heater fuse has probably failed)
• Heater voltage is too low
• Temperature zone has timed out (heater failed, bad heater wiring, or loose
temperature sensor)
• Problem with the temperature control electronics
• Source heater is open
• Source heater is shorted
• Mass filter heater is open (either front or rear quad)
• Mass filter heater is shorted (either front or rear quad)
The high-vacuum pump is not ready
• Turbo pump is on but has not had enough time (10 minutes) to reach 80% of
its normal operating speed
• Turbo pump is not working correctly
• Foreline pump has not reached its target of 300 mTorr after 10 minutes
• MS electronics are not working correctly
The system is in vent state
The message says the system is vented, but if the fault has just occurred it may
still be under vacuum and the turbo pump may still be at high speed. Wait at
least 30 minutes after seeing this message before you actually vent the MS.
• System was vented purposely (no problem)
• Fan fault has turned off the high-vacuum pump (power cycle the MS to clear
the fault)
• Fuse for the high-vacuum pump has failed
• MS electronics are not working correctly
Venting the MS too soon after this message appears can damage a turbo pump.
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