Troubleshooting and Maintenance Manual 5
Turbo Pump 135
Analyzer Chambers 135
Side Plates 136
Vacuum Seals 137
Foreline Gauge 139
Turbo Pump and Fan 140
Calibration Valve and Vent Valve 141
7 Analyzers and Collision Cell
Overview 146
EI Ion Source 148
CI Ion Source 150
Filaments 152
Other Source Elements 154
Quadrupole Mass Filters 156
Post- and Pre-Filters 159
Collision Cell 160
Detector 161
Analyzer Heaters and Radiators 163
8 Electronics
Power Switch 166
Ion Source Board 167
Quadrupole Boards 168
Collision Cell Board 169
Detector Board 170
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