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COXEM EM-30PLUS - User Manual

COXEM EM-30PLUS
126 pages
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Scanning Electron Microscope
EM-30PLUS Operating Manual
COXEM Co., Ltd.

Table of Contents

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Summary

1. Introduction and Safety

1.3 Cautions Before Use

Essential safety and handling precautions to be followed before operating the equipment.

4. Preparation for Imaging

4.1 Power ON;OFF Procedures

Step-by-step instructions for powering on and off the EM-30PLUS equipment safely.

4.2 Electron Beam Setup

Steps to activate the electron beam, including filament optimization and bias value adjustment.

5. Image Acquisition and Settings

5.2 Acceleration Voltage Settings

Guides on selecting and setting acceleration voltage for optimal image resolution and surface observation.

5.4 Focus Adjustment

Explains how aperture size and WD affect image depth and clarity, influencing focus.

6. Aperture Alignment and Wobble Operation

6.2 Wobble Procedure for Aperture Alignment

Identifies situations requiring wobble operation and the general procedure for aperture alignment.

6.2.1 Wobble Operation 1

Procedure for aperture alignment when images are slightly out of focus but visible.

6.2.2 Wobble Operation 2

Procedure for aperture alignment when no images are displayed, requiring e-gun and aperture resetting.

6.2.4 Aperture Alignment (Resetting)

Detailed steps for aligning the aperture when focus cannot be adjusted manually.

7. Image Management and Saving

7.3 Image Save Function

Temporarily saves scanned images using the [Image] function and specifies the save path.

8. Alignment Operations

8.1 E-Gun Alignment Summary

Explains the necessity and purpose of E-gun alignment for optimal beam path and performance.

COXEM EM-30PLUS Specifications

General IconGeneral
BrandCOXEM
ModelEM-30PLUS
CategoryMicroscope
LanguageEnglish