Scanning Electron Microscope EM-30PLUS Operating Manual
7
1. Introduction
1.1 Descriptions on Product Parts
It describes the names and functions of the parts of EM-30PLUS.
1.1.1 Main Body of EM-30PLUS
It is a cover for protecting e-gun.
Its vacuum state is displayed with LED lamp.
It cancels or set up the state of vacuum by
force.
It is a door for chamber in which a specimen is
placed.
It is a handle used when controlling aperture.
It is used for turning on the power.
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