Scanning Electron Microscope EM-30PLUS Operating Manual
8
1.1.2 Back and Inside of EM-30PLUS
Electronic board and
radiator
It is an electronic board and a radiator.
It measures the vacuum state.
It keeps vacuum state high.
It provides the power of high voltage.
It absorbs vibrational energy.
It moves X axis, Y axis, and T axis Stage.
It is a vacuum chamber in which a specimen is
placed.
It is a lens condensing electron beam.
It is a vacuum vent pipe.
It radiates electronic beams.
It is a BSE electronic board.
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