COXEM EM-30PLUS - 1. Introduction and Safety

Scanning Electron Microscope EM-30PLUS Operating Manual
2
Contents
1. Introduction .................................................................................................................. 7
1.1 Descriptions on Product Parts .................................................................................................. 7
1.1.1 Main Body of EM-30PLUS ....................................................................................................................... 7
1.1.2 Back and Inside of EM-30PLUS ............................................................................................................. 8
1.2 Operational Procedure of Equipment ...................................................................................... 9
1.3 Cautions before Use .................................................................................................................. 10
1.3.1 Handling ......................................................................................................................................................... 10
1.3.2 Permission by Operation ........................................................................................................................ 11
1.3.3 Safety Precautions ..................................................................................................................................... 12
2. Screen Composition .................................................................................................. 14
2.1 Main Screen of NS ..................................................................................................................... 14
2.2 Explanations on Buttons .......................................................................................................... 15
2.2.1 E-Gun Power Button ................................................................................................................................. 15
2.2.2 Vacuum State Buttons ............................................................................................................................. 16
2.2.3 Selection of Detector Mode ................................................................................................................. 17
2.3 Display Mode .............................................................................................................................. 18
2.4 Image Mode ................................................................................................................................ 20
2.5 Stage & Holder Information .................................................................................................... 20
2.5.1 Maximum Tilt Angle ................................................................................................................................. 21
2.6 Right Function Tap .................................................................................................................... 22
2.6.1 Function .......................................................................................................................................................... 22
2.6.2 Magnification ............................................................................................................................................... 23
2.6.3 Image Viewer Setting ............................................................................................................................... 24
2.7 Top Function Tap........................................................................................................................ 25
2.7.1 Setup ................................................................................................................................................................ 26
2.7.2 Option ............................................................................................................................................................. 33
2.7.3 Help .................................................................................................................................................................. 36
2.8 Image Viewing ............................................................................................................................ 37
2.8.1 Screen for Image Viewing ..................................................................................................................... 37
2.8.2 Image Tools .................................................................................................................................................. 37
2.8.3 Image Correction ....................................................................................................................................... 38
2.8.4 Image Shift .................................................................................................................................................... 38
2.9 Other Buttons ............................................................................................................................. 39
2.9.1 Delete All ....................................................................................................................................................... 39