COXEM EM-30PLUS - 6.2 Wobble Procedure for Aperture Alignment

Scanning Electron Microscope EM-30PLUS Operating Manual
101
6.2 Wobble (Procedure of Aperture Alignment)
* Wobble is needed in the following cases.
1) when images are not in focus, even after adjusting focus
2) when SPOT SIZE is changed
3) when high acceleration voltage is changed
4) when Filament is replaced
5) when e-gun is aligned newly
After selecting Wobble,
if the position of specimens doesn’t move up/down/left/right on the screen when changing
the value of focus and only the focus is changed,
Wobble(Aperture Align) is in the normal state.
If the position of the specimens is changed largely on the screen, aperture alignment is
needed. (Wobble Operation 1)
If no images are shown on the screen, aperture is completely out of the electron beam path.
(Wobble Operation 2)