Scanning Electron Microscope EM-30PLUS Operating Manual
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5.2.2 Setting Acceleration Voltage
If you set low acceleration voltage, it is adequate for observing specimen surface at low
magnification, and as the value gets higher, it is adequate for acquiring high resolution
images. (maximum value 30kV)
1) Select the value of acceleration voltage you want.
In order to select acceleration voltage, use increase/decrease(▲/▼) button on acceleration
voltage box or change it by selecting the fixed value of acceleration voltage.
2) After changing acceleration voltage, carry out alignment of e-gun and aperture Wobble
operation.
* Be sure to carry out alignment of electron gun and wobble operation whenever you
change the value of acceleration voltage.
* Readjust the acceleration voltage below 20kV after finishing measurement, and
terminate E-Gun Off and NS. (when using over 20KV)
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